Structural Evolution of Bulk Silver during Cold Rolling and Annealing
نویسندگان
چکیده
Sputtering target is commonly used in semiconductor manufacturing for the preparation of thin films. Cold rolling and annealing treatment bulk Ag routine process to prepare sputtering target. In this paper, microstructure evolution after cold was studied, results showed that temperature affects recrystallized structure 600 °C/1 h can achieve complete recrystallization. At same time, texture also observed discussed.
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ژورنال
عنوان ژورنال: Metals
سال: 2022
ISSN: ['2075-4701']
DOI: https://doi.org/10.3390/met12091525